The impact of deposition layer and annealing temperature towards BST thin film characteristics / \c They Yee Chin.
The main objective of this research is to correlate the microstructure and electrical properties of BST thin film. In order to archieve the main objective there are few sub-objectives needed to be done which are listed below ; to characterize microstructure of BST by varying the number of deposition...
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| Format: | Thesis Book |
| Language: | English |
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Perlis, Malaysia
School of Microelectronic Engineering, Universiti Malaysia Perlis
2016
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| Summary: | The main objective of this research is to correlate the microstructure and electrical properties of BST thin film. In order to archieve the main objective there are few sub-objectives needed to be done which are listed below ; to characterize microstructure of BST by varying the number of deposition layer and annealing temperature ; to characterize the electrical of BST by varying the number of deposition layer and annealing temperature. |
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| Physical Description: | xiv, 84 pages colour illustration 30cm |
| Bibliography: | Includes bibliographical references. |