The impact of deposition layer and annealing temperature towards BST thin film characteristics / \c They Yee Chin.
The main objective of this research is to correlate the microstructure and electrical properties of BST thin film. In order to archieve the main objective there are few sub-objectives needed to be done which are listed below ; to characterize microstructure of BST by varying the number of deposition...
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Format: | Thesis Book |
Language: | English |
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Perlis, Malaysia
School of Microelectronic Engineering, Universiti Malaysia Perlis
2016
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100 | 1 | |a They, Yee Chin, |e author | |
245 | 1 | 4 | |a The impact of deposition layer and annealing temperature towards BST thin film characteristics / \c They Yee Chin. |
264 | 1 | |a Perlis, Malaysia |b School of Microelectronic Engineering, Universiti Malaysia Perlis |c 2016 | |
300 | |a xiv, 84 pages |b colour illustration |c 30cm | ||
336 | |a text |b txt |2 rdacontent | ||
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338 | |a volume |b nc |2 rdacarrier | ||
502 | |a Thesis (Master of Science) -- Universiti Malaysia Perlis. School of Microelectronic Engineering, 2016 | ||
504 | |a Includes bibliographical references. | ||
520 | |a The main objective of this research is to correlate the microstructure and electrical properties of BST thin film. In order to archieve the main objective there are few sub-objectives needed to be done which are listed below ; to characterize microstructure of BST by varying the number of deposition layer and annealing temperature ; to characterize the electrical of BST by varying the number of deposition layer and annealing temperature. | ||
541 | |a Gift from Centre for Graduate Studies (Master of Science) |b 2019 | ||
650 | 0 | |a Ferroelastic crystals | |
650 | 0 | |a Ferroelectric thin films | |
650 | 0 | |a Ceramic materials | |
710 | 2 | |a Universiti Malaysia Perlis | |
720 | 1 | |a Professor Dr. Zaliman Sauli, |e supervisor | |
790 | 1 | |a School of Microelectronic Engineering | |
791 | 1 | |a Master of Science | |
792 | 1 | |a 2016 | |
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