VLSI technology /
Covers the broad spectrum of VLSI processes, semiconductor technology, micromachining, microelectronics packaging, compound semiconductor digital integrated circuit technology, and multichip module technologies.
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Boca Raton :
CRC Press,
2003.
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| Schriftenreihe: | Principles and applications in engineering ;
8. |
| Schlagworte: | |
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| Zusammenfassung: | Covers the broad spectrum of VLSI processes, semiconductor technology, micromachining, microelectronics packaging, compound semiconductor digital integrated circuit technology, and multichip module technologies. |
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| Beschreibung: | 1 volume (various pagings) : illustrations ; 27 cm. |
| Bibliographie: | Includes bibliographical references and index. |
| ISBN: | 084931738X 9780849317385 |