VLSI technology /
Covers the broad spectrum of VLSI processes, semiconductor technology, micromachining, microelectronics packaging, compound semiconductor digital integrated circuit technology, and multichip module technologies.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
2003.
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| Series: | Principles and applications in engineering ;
8. |
| Subjects: | |
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| Summary: | Covers the broad spectrum of VLSI processes, semiconductor technology, micromachining, microelectronics packaging, compound semiconductor digital integrated circuit technology, and multichip module technologies. |
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| Physical Description: | 1 volume (various pagings) : illustrations ; 27 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 084931738X 9780849317385 |