Principles of plasma discharges and materials processing /

Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. ( Michael A.), 1950- (Author)
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: Hoboken, N.J. Wiley 2005.
Edition:2nd ed.
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry > Industrial applications.
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Description
Physical Description:xxxv, 757 pages illustration 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0471720011

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