Geng, H. (2005). Semiconductor manufacturing handbook. McGraw-Hill.
Chicago Style (17th ed.) CitationGeng, Hwaiyu. Semiconductor Manufacturing Handbook. New York: McGraw-Hill, 2005.
MLA (8th ed.) CitationGeng, Hwaiyu. Semiconductor Manufacturing Handbook. McGraw-Hill, 2005.
Warning: These citations may not always be 100% accurate.