Handbook of silicon wafer cleaning technology /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Norwich, NY
William Andrew
c2008.
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| Edition: | 2nd ed. |
| Series: | Materials science & process technology series
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| Subjects: | |
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| Physical Description: | xxvi, 718 pages illustrations 24 cm. |
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| ISBN: | 0815515545 9780815515548 |