Handbook of silicon wafer cleaning technology /

Saved in:
Bibliographic Details
Other Authors: Reinhardt, Karen A., Kern, Werner, 1925-
Format: Book
Language:English
Published: Norwich, NY William Andrew c2008.
Edition:2nd ed.
Series:Materials science & process technology series
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Physical Description:xxvi, 718 pages illustrations 24 cm.
ISBN:0815515545
9780815515548