Handbook of silicon wafer cleaning technology /
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Other Authors: | , |
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Format: | Book |
Language: | English |
Published: |
Norwich, NY
William Andrew
c2008.
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Edition: | 2nd ed. |
Series: | Materials science & process technology series
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Subjects: | |
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Physical Description: | xxvi, 718 pages illustrations 24 cm. |
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ISBN: | 0815515545 9780815515548 |