Handbook of silicon wafer cleaning technology /

Handbook of silicon wafer cleaning technology /

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Bibliographic Details
Other Authors:	Reinhardt, Karen A., Kern, Werner, 1925-
Format:	Book
Language:	English
Published:	Norwich, NY William Andrew c2008.
Edition:	2nd ed.
Series:	Materials science & process technology series
Subjects:	Silicon-on-insulator technology.
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