Process engineering analysis in semiconductor device fabrication /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York
McGraw-Hill
c1993.
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| Subjects: | |
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| Physical Description: | xvii, 774 pages: illustrations; 23 cm. |
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| ISBN: | 0070418535 (hc) 9780070418530 (hc) 0071127445 (pbk) 9780071127448 (pbk) |