APA (7th ed.) Citation

Levinshtein, M. E. (1997). Semiconductor technology: Processing and novel fabrication techniques. John Wiley & Sons.

Chicago Style (17th ed.) Citation

Levinshtein, M. E. Semiconductor Technology: Processing and Novel Fabrication Techniques. New York: John Wiley & Sons, 1997.

MLA (8th ed.) Citation

Levinshtein, M. E. Semiconductor Technology: Processing and Novel Fabrication Techniques. John Wiley & Sons, 1997.

Warning: These citations may not always be 100% accurate.