Semiconductor technology : processing and novel fabrication techniques /

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Bibliographic Details
Other Authors: Levinshtein, M. E. (Mikhail Efimovich)
Format: Book
Language:English
Published: New York John Wiley & Sons c1997
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Description
Item Description:"A Wiley-Interscience publication."
Physical Description:xviii, 240 pages: illustrations; 24 cm.
Bibliography:Includes bibliographical references
ISBN:0471127922