Semiconductor technology : processing and novel fabrication techniques /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York
John Wiley & Sons
c1997
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| 090 | 0 | 0 | |a TK7871.85 |b S471 1997 |
| 245 | 0 | 0 | |a Semiconductor technology : |b processing and novel fabrication techniques / |c by edited Mikhail E. Levinshtein and Michael S. Shur |
| 264 | 1 | |a New York |b John Wiley & Sons |c c1997 | |
| 264 | 4 | |c ©1997 | |
| 300 | |a xviii, 240 pages: |b illustrations; |c 24 cm. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a unmediated |b n |2 rdamedia | ||
| 338 | |a volume |b nc |2 rdacarrier | ||
| 500 | |a "A Wiley-Interscience publication." | ||
| 504 | |a Includes bibliographical references | ||
| 541 | |a YUHA |d 6-Apr-02 | ||
| 594 | |a 10-Apr-02 | ||
| 650 | 0 | |a Semiconductor doping. | |
| 650 | 0 | |a Semiconductors. | |
| 650 | 0 | |a Semiconductors |x Defects | |
| 700 | 1 | |a Levinshtein, M. E. |q (Mikhail Efimovich) | |
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