Process technology for silicon carbide devices /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
United Kingdom
The Institution of Electrical Engineers
2002
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| Series: | EMIS processing series
no. 2 |
| Subjects: | |
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| Physical Description: | xxi, 176 pages: illustrations; 25 cm. |
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| ISBN: | 0852969988 |