Semiconductor safety handbook : safety and health in the semiconductor industry /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Westwood
Noyes Publications
c1998.
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| Series: | Semiconductor safety series
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| Subjects: | |
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| Physical Description: | xxiv, 610 pages: illustrations; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0815514182 |