McGuire, G. E. (1988). Semiconductor materials and process technology handbook: For very large scale integration (VLSI) and ultra large scale integration (ULSI). Noyes Publications.
Chicago Style (17th ed.) CitationMcGuire, G. E. Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). New York: Noyes Publications, 1988.
MLA (8th ed.) CitationMcGuire, G. E. Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI). Noyes Publications, 1988.
Warning: These citations may not always be 100% accurate.