Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /

Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /

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Bibliographic Details
Other Authors: McGuire, G. E.
Format: Book
Language:English
Published: New York Noyes Publications c1988.
Series:Materials science and process technology series
Subjects:
Integrated circuits > Very large scale integration > Design and construction > Handbooks, manuals, etc.
Integrated circuits > Ultra large scale integration > Design and construction > Handbooks, manuals, etc.
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Description
Physical Description:xiii, 675 pages: illustrations; 24 cm.
Bibliography:Includes bibliographies and index.
ISBN:0815511507

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