Principles of chemical vapor deposition /
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| Other Authors: | , |
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| Format: | Book |
| Language: | English |
| Published: |
Dordrecht, The Netherlands
Kluwer Academic Publishers
2003.
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| Subjects: | |
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| Physical Description: | xi, 273 pages: illustrations ; 24 cm. |
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| ISBN: | 1402012489 |