Handbook of chemical vapor deposition /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Norwich, NY
Noyes Publications
1999.
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| Edition: | 2nd edition |
| Subjects: | |
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| Item Description: | Rev. ed. of Handbook of chemical vapor deposition (CVD), c1992. |
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| Physical Description: | xxiv, 482 pages: illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references. |
| ISBN: | 0815514328 |