APA (7th ed.) Citation

Fruhauf, J. (2005). Shape and functional elements of the bulk silicon microtechnique: A manual of wet-etched silicon structures. Springer.

Chicago Style (17th ed.) Citation

Fruhauf, Joachim. Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-etched Silicon Structures. Berlin: Springer, 2005.

MLA (8th ed.) Citation

Fruhauf, Joachim. Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-etched Silicon Structures. Springer, 2005.