Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures /

Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures /

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Bibliographic Details
Main Author:	Fruhauf, Joachim (Author)
Format:	Book
Language:	English
Published:	Berlin Springer 2005.
Subjects:	Silicon. Detectors.
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