Modelling of microfabrication systems /
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Main Author: | |
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Other Authors: | |
Format: | Book |
Language: | English |
Published: |
Berlin
Springer
c2003.
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Series: | Microtechnology and MEMS
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Subjects: | |
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Physical Description: | x, 269 pages: illustrations; 24 cm. |
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Bibliography: | Bibliography : p. [249]-261 |
ISBN: | 3540002529 |