Modelling of microfabrication systems /

Saved in:
Bibliographic Details
Main Author: Nassar, Raja (Author)
Other Authors: Dai, Weizhong
Format: Book
Language:English
Published: Berlin Springer c2003.
Series:Microtechnology and MEMS
Subjects:
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Physical Description:x, 269 pages: illustrations; 24 cm.
Bibliography:Bibliography : p. [249]-261
ISBN:3540002529