Modelling of microfabrication systems /
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
Berlin
Springer
c2003.
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| Series: | Microtechnology and MEMS
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| Subjects: | |
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| Physical Description: | x, 269 pages: illustrations; 24 cm. |
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| Bibliography: | Bibliography : p. [249]-261 |
| ISBN: | 3540002529 |