Modelling of microfabrication systems /

Modelling of microfabrication systems /

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Bibliographic Details
Main Author: Nassar, Raja (Author)
Other Authors: Dai, Weizhong
Format: Book
Language:English
Published: Berlin Springer c2003.
Series:Microtechnology and MEMS
Subjects:
Microelectronics > Mathematical models.
Integrated circuits > Mathematical models.
Microelectromechanical systems > Mathematical models.
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Modelling of microfabrication systems
by Nassar, Raja
Published 2003
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Modelling of microfabrication systems
by Nassar, Raja
Published 2003
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