Substrate surface preparation handbook / Max Robertson.
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| Format: | Book |
| Language: | English |
| Published: |
Norwood, MA
Artech House
c2012.
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Table of Contents:
- Introduction
- Preparation : before the start
- Lapping
- Polishing
- Specific processes and materials
- Specialized techniques
- Surface finish
- Optics
- Semiconductor device Deconstruction
- Metallurgical Polishing and Microscopy
- Laboratory Setup
- Using Interferometry.