Mems packaging /

Mems packaging /

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Bibliographic Details
Corporate Author: Institution of Electrical Engineers
Other Authors: Hsu, Tai-Ran
Format: Book
Language:English
Published: London INSPEC c2004
Subjects:
Microelectromechanical systems
Microelectronic packaging.
Microelectronics
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Description
Physical Description:xxix, 275 pages illustrations 25 cm.
ISBN:0863413358 :
9780863413353

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