APA (7th ed.) Citation

Santos, H. J. d. l. (2005). Principles and applications of nanoMEMS physics. Springer.

Chicago Style (17th ed.) Citation

Santos, Hector J. de los. Principles and Applications of NanoMEMS Physics. Boston, MA: Springer, 2005.

MLA (8th ed.) Citation

Santos, Hector J. de los. Principles and Applications of NanoMEMS Physics. Springer, 2005.