Principles and applications of nanoMEMS physics
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| Main Author: | |
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA
Springer
2005.
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| Series: | Microsystems,
15 |
| Subjects: | |
| Online Access: | Click here to view the full text content |
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| Physical Description: | 1 online resource digital. |
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| ISBN: | 9780387258348 9781402032387 |
| ISSN: | 1389-2134 ; |