Electroceramic-based MEMS fabrication-technology and applications /
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| Corporate Author: | |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Boston, MA
Springer
2005
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| Series: | Electronic Materials: Science and Technology,
9 |
| Subjects: | |
| Online Access: | Click here to view the full text content |
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| Physical Description: | 1 online resource digital. |
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| ISBN: | 9780387233192 9780387233109 |
| ISSN: | 1386-3290 ; |