Electroceramic-based MEMS fabrication-technology and applications /
Saved in:
| Institution som forfatter: | |
|---|---|
| Andre forfattere: | |
| Format: | eBog |
| Sprog: | English |
| Udgivet: |
Boston, MA
Springer
2005
|
| Serier: | Electronic Materials: Science and Technology,
9 |
| Fag: | |
| Online adgang: | Click here to view the full text content |
| Tags: |
Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
|
| LEADER | 01286nmm a2200349 a 4500 | ||
|---|---|---|---|
| 001 | vtls000038765 | ||
| 003 | MY-ArUMP | ||
| 005 | 20210731150407.0 | ||
| 007 | cr nn 008mamaa | ||
| 008 | 120308s2005 mau f j 00 0 eng d | ||
| 020 | |a 9780387233192 | ||
| 020 | |a 9780387233109 | ||
| 035 | |a (OCoLC)ocm62756344 | ||
| 039 | 9 | |a 201203081351 |b SMT |c 201106231047 |d SMR |c 200908170824 |d SMT |y 200809051042 |z SMT | |
| 040 | |a MYPMP |b eng |c MYPMP |e rda | ||
| 245 | 0 | 0 | |a Electroceramic-based MEMS |b fabrication-technology and applications / |c edited by Nava Setter. |
| 264 | 1 | |a Boston, MA |b Springer |c 2005 | |
| 300 | |a 1 online resource |b digital. | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 347 | |a text file |b PDF |2 rda | ||
| 490 | 0 | |a Electronic Materials: Science and Technology, |x 1386-3290 ; |v 9 | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 700 | 1 | |a Setter, Nava. | |
| 710 | 2 | |a SpringerLink (Online service) | |
| 773 | 0 | |t Springer e-books | |
| 856 | 4 | 0 | |y Click here to view the full text content |u http://dx.doi.org/10.1007/b101200 |
| 942 | |2 lcc |c BK-EBOOK | ||
| 949 | |a VIRTUAITEM |d 10011 |x 9 | ||
| 999 | |c 23118 |d 23118 | ||
| 952 | |0 0 |1 0 |2 lcc |4 0 |7 0 |9 28008 |a FSGM |b FSGM |d 2021-07-31 |l 0 |r 2021-07-31 |w 2021-07-31 |y BK-EBOOK | ||