Precursor chemistry of advanced materials CVD, ALD and nanoparticles
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| Corporate Author: | |
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| Other Authors: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin Heidelberg
Springer-Verlag
2005
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| Series: | Topics in Organometallic Chemistry,
9 |
| Subjects: | |
| Online Access: | Click here to view the full text content |
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| Physical Description: | 1 online resource digital. |
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| ISBN: | 9783540314516 9783540016052 |
| ISSN: | 1436-6002 ; |