Micromachined thin-film sensors for SOI-CMOS Co-integration

Micromachined thin-film sensors for SOI-CMOS Co-integration

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Bibliographic Details
Main Author: Laconte, J. (Author)
Corporate Author: SpringerLink (Online service)
Other Authors: Flandre, D., Raskin, J. -P
Format: eBook
Language:English
Published: Boston, MA Springer, 2006.
Subjects:
Electronics
Engineering
Particles (Nuclear physics)
Physical optics
Surfaces (Physics)
Systems engineering
Online Access:Click here to view the full text content
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