Micro and smart systems : technology and modeling /

"This first undergraduate-level textbook on microsystems and smart systems makes a burgeoning area of professional practice accessible to course teaching. It is based on a course introduced at VTU in India in 2009, which has already been taught to nearly 1000 students. Practical examples and ex...

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Hlavní autor: Ananthasuresh, G.K
Další autoři: Vinoy, K. J., Gopalakrishnan, S., Bhat, K. N., Aatre, V. K.
Médium: Kniha
Jazyk:English
Vydáno: Hoboken, NJ John Wiley and Sons 2012.
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Obsah:
  • Note continued: 9.2. Scaling in the Electrostatic Domain
  • 9.3. Scaling in the Magnetic Domain
  • 9.4. Scaling in the Thermal Domain
  • 9.5. Scaling in Diffusion
  • 9.6. Scaling in Fluids
  • 9.7. Scaling Effects in the Optical Domain
  • 9.8. Scaling in Biochemical Phenomena
  • 9.9. Scaling in Design and Simulation
  • 9.10. Summary
  • ch. 10 Simulation of Microsystems Using FEA Software
  • 10.1. Background
  • 10.2. Force-Deflection of a Tapering Helical Spring Using ABAQUS
  • 10.3. Natural Frequencies of an Accelerometer in ANSYS
  • 10.4. Deflection of an Electro-Thermal-Compliant (ETC) Microactuator in COMSOL MultiPhysics
  • 10.5. Lumped Stiffness Constant of a Comb-Drive Suspension in NISA
  • 10.6. Piezoelectric Bimorph Beam in a Customized FEA Program
  • 10.7. Resonant Micro-Accelerometer in ABAQUS
  • 10.8. Pull-In Voltage of an RF-MEMS Switch in IntelliSuite
  • 10.9.A Capacitive Pressure Sensor in Coventorware
  • 10.10. Summary.