Rare-earth implanted MOS devices for silicon photonics microstructural, electrical and optoelectronic properties /
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Main Author: | Rebohle, Lars (Author) |
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Corporate Author: | SpringerLink (Online service) |
Other Authors: | Skorupa, Wolfgang |
Format: | eBook |
Language: | English |
Published: |
Berlin, Heidelberg
Springer
2010.
|
Series: | Springer Series in Materials Science,
142 |
Subjects: | |
Online Access: | Click here to view the full text content |
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