Silicon processing for the VLSI era /

Silicon processing for the VLSI era /

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Bibliographic Details
Main Author: Wolf, Stanley, 1943- (Author)
Other Authors: Tauber, Richard N.
Format: Thesis Book
Language:English
Published: Sunset Beach Lattice Press c1990 - c2002
Edition:2nd ed.
Subjects:
Integrated circuits > Very large scale integration.
Semiconductors > Etching.
Silicon.
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Description
Physical Description:4 volumes illustrations 24 cm.
ISBN:0961672145 (v.2)
0961672161 (v.1) :/c RM 803.80
0961672153 (v.3)
096167217X (v.4)

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