Silicon processing for the VLSI era /

Silicon processing for the VLSI era /

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Bibliographic Details
Main Author: Wolf, Stanley, 1943- (Author)
Other Authors: Tauber, Richard N.
Format: Thesis Book
Language:English
Published: Sunset Beach Lattice Press c1990 - c2002
Edition:2nd ed.
Subjects:
Integrated circuits > Very large scale integration.
Semiconductors > Etching.
Silicon.
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Table of Contents:
  • vol.1. Process technology
  • vol. 2. Process Integration
  • vol. 3. The Submicron MOSFET
  • vol. 4 Deep-Submicron Process Technology.

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