Silicon processing for the VLSI era /

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Bibliographic Details
Main Author:	Wolf, Stanley, 1943- (Author)
Other Authors:	Tauber, Richard N.
Format:	Thesis Book
Language:	English
Published:	Sunset Beach Lattice Press c1990 - c2002
Edition:	2nd ed.
Subjects:	Integrated circuits > Very large scale integration. Semiconductors > Etching. Silicon.
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