Carbon-containing layers on silicon : growth, properties, and applications /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Uetikon-Zuerich, Switzerland
Trans Tech Publications
c1999.
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| Series: | Material science foundations;
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| Subjects: | |
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| Physical Description: | 77 pages : illustrations ; c25 cm. |
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| Bibliography: | Bibliography : p. 72-77. |
| ISBN: | 0878498346 |