Nanofabrication : Techniques and principles /
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...
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| Další autoři: | , |
| Médium: | E-kniha |
| Jazyk: | English |
| Vydáno: |
Vienna :
Springer Vienna
2012.
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| On-line přístup: | Click here to view the full text content |
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