Nanofabrication : Techniques and principles /
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...
שמור ב:
מחבר תאגידי: | |
---|---|
מחברים אחרים: | , |
פורמט: | ספר אלקטרוני |
שפה: | English |
יצא לאור: |
Vienna :
Springer Vienna
2012.
|
נושאים: | |
גישה מקוונת: | Click here to view the full text content |
תגים: |
הוספת תג
אין תגיות, היה/י הראשונ/ה לתייג את הרשומה!
|
System Under Maintenance
Our Library Management System is currently under maintenance.
Holdings and item availability information is currently unavailable. Please accept our apologies for any inconvenience this may cause and contact us for further assistance: