Contamination and ESD control in high-technology manufacturing /

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Bibliographic Details
Main Author: Welker, R. W. (Author)
Other Authors: Nagarajan, R. (Ramamurthy), Newberg, Carl E.
Format: Book
Language:English
Published: Hoboken, N.J. IEEE Press/Wiley-Interscience c2006.
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Description
Physical Description:xvi, 498 p. ill. 26 cm.
ISBN:0471414522 (hc)
9780471414520 (hc)