Contamination and ESD control in high-technology manufacturing /
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Main Author: | |
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Other Authors: | , |
Format: | Book |
Language: | English |
Published: |
Hoboken, N.J.
IEEE Press/Wiley-Interscience
c2006.
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Physical Description: | xvi, 498 p. ill. 26 cm. |
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ISBN: | 0471414522 (hc) 9780471414520 (hc) |