Nanoimprint lithography: an enabling process for nanofabrication /
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It pro...
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| Format: | eBook |
| Langue: | English |
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Berlin, Heidelberg
Springer Berlin Heidelberg
2013.
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| Accès en ligne: | Click here to view the full text content |
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