APA (7th ed.) Citation

Li, Y. (2007). Microelectronic applications of chemical mechanical planarization. John Wiley & Sons.

Chicago Style (17th ed.) Citation

Li, Yuzhuo. Microelectronic Applications of Chemical Mechanical Planarization. Hoboken, N.J: John Wiley & Sons, 2007.

MLA (8th ed.) Citation

Li, Yuzhuo. Microelectronic Applications of Chemical Mechanical Planarization. John Wiley & Sons, 2007.

Warning: These citations may not always be 100% accurate.