Microelectronic applications of chemical mechanical planarization /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Hoboken, N.J.
John Wiley & Sons
2007.
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| Physical Description: | xxv, 734 pages: illustrations; 24 cm. |
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| ISBN: | 0471719196 9780471719199 |