Microelectronic applications of chemical mechanical planarization /

Microelectronic applications of chemical mechanical planarization /

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Bibliographic Details
Other Authors: Li, Yuzhuo
Format: Book
Language:English
Published: Hoboken, N.J. John Wiley & Sons 2007.
Subjects:
Integrated circuits > Design and construction.
Chemical mechanical planarization.
Microelectronics > Materials.
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