Institute of Electrical and Electronics Engineers & Trimmer, W. (1997). Micromechanics and MEMS: Classic and seminal papers to 1990. IEEE Press.
Cita Chicago (17th ed.)Institute of Electrical and Electronics Engineers i W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. New York: IEEE Press, 1997.
Cita MLA (8th ed.)Institute of Electrical and Electronics Engineers i W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. IEEE Press, 1997.
Atenció: Aquestes cites poden no estar 100% correctes.