Institute of Electrical and Electronics Engineers & Trimmer, W. (1997). Micromechanics and MEMS: Classic and seminal papers to 1990. IEEE Press.
Lua i Stíl Chicago (17ú heag.)Institute of Electrical and Electronics Engineers agus W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. New York: IEEE Press, 1997.
Lua MLA (8ú heag.)Institute of Electrical and Electronics Engineers agus W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. IEEE Press, 1997.
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