Institute of Electrical and Electronics Engineers & Trimmer, W. (1997). Micromechanics and MEMS: Classic and seminal papers to 1990. IEEE Press.

Institute of Electrical and Electronics Engineers and W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. New York: IEEE Press, 1997.

Institute of Electrical and Electronics Engineers and W. Trimmer. Micromechanics and MEMS: Classic and Seminal Papers to 1990. IEEE Press, 1997.