Micromechanics and MEMS : classic and seminal papers to 1990 /
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| Format: | Book |
| Language: | English |
| Published: |
New York
IEEE Press
1997.
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| Item Description: | "A selected reprint volume." |
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| Physical Description: | xv, 704 pages: illustrations; 28 cm. |
| ISBN: | 0780310853 (pbk) 9780780310858 (pbk) |