Micromechanics and MEMS : classic and seminal papers to 1990 /
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| Format: | Book |
| Language: | English |
| Published: |
New York
IEEE Press
1997.
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| 245 | 0 | 0 | |a Micromechanics and MEMS : |b classic and seminal papers to 1990 / |c edited by William S. Trimmer |
| 264 | 1 | |a New York |b IEEE Press |c 1997. | |
| 300 | |a xv, 704 pages: |b illustrations; |c 28 cm. | ||
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| 650 | 0 | |a Microelectromechanical systems. | |
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