Micromechanics and MEMS : classic and seminal papers to 1990 /

Micromechanics and MEMS : classic and seminal papers to 1990 /

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Detaylı Bibliyografya
Müşterek Yazar:	Institute of Electrical and Electronics Engineers
Diğer Yazarlar:	Trimmer, W.
Materyal Türü:	Kitap
Dil:	English
Baskı/Yayın Bilgisi:	New York IEEE Press 1997.
Konular:	Microelectronics Microelectromechanical systems. Actuators.
Etiketler:	Etiketle Etiket eklenmemiş, İlk siz ekleyin!

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