Maluf, N., & Williams, K. (2004). An Introduction to microelectromechanical systems engineering (Second edition.). Artech House.
Cita Chicago (17th ed.)Maluf, Nadim, i Kirt Williams. An Introduction to Microelectromechanical Systems Engineering. Second edition. Boston: Artech House, 2004.
Cita MLA (8th ed.)Maluf, Nadim, i Kirt Williams. An Introduction to Microelectromechanical Systems Engineering. Second edition. Artech House, 2004.
Atenció: Aquestes cites poden no estar 100% correctes.